EGT 280 Introduction to Microsystems (3 credits)

Hours: 3 classroom + 0 lab/studio
Prerequisite(s):
Taught: Spring and summer
Introduction to microsystems including materials properties (physical, thermal, electrical, and mechanical), fundamentals of microfabrication including various deposition methods, photolithography, etching, LIGA electroplating, and self-assembly characterization of small structures and applications of microdevices such as MEMS sensors and actuators, accelerometers, optical switches and microfluidics.
Repeatable: No
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