Aug 05, 2020  
2017-2018 Undergraduate Catalog 
    
2017-2018 Undergraduate Catalog [ARCHIVED CATALOG]

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EGT 280 Introduction to Microtechnology (3 credits)

Hours: 3 classroom + 0 lab/studio
Prerequisite(s): PHY 211  or PHY 220 .
Taught: Summer only
Introduction to microtechnology including materials properties (physical, thermal, electrical, and mechanical), fundamentals of microfabrication including various deposition methods, photolithography, etching, LIGA electroplating, and self-assembly characterization of small structures and applications of microdevices such as MEMS sensors and actuators, accelerometers, optical switches and microfluidics.
Repeatable: No



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